Title :
A Study Of The Emission Characteristics Of All-metal Cold Cathodes
Author :
Sokolich, M. ; Longo, R.T. ; Komm, D.S. ; Dibb, D.R. ; Arthur, A.
Author_Institution :
Hughes Aircraft Company
Keywords :
Apertures; Cathodes; Cleaning; Dielectrics; Field emitter arrays; Geometry; Leakage current; Plasma applications; Scanning electron microscopy; Testing;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700249
