Structural design of parallel micro-vibration platform based on three-translational mechanism

Unlike traditional vibration platform, parallel microvibration platform can solve the problem of multi-dimensional vibration at the same time. Structural design was carried out by selecting three-translational parallel mechanism as the main mechanism, selecting flexible hinge without gap and friction as kinematical pair, and selecting reasonable piezoelectric actuator as driving component. According to the design requirements of the micro-vibration platform, by analyzing relationship between structural size and performance of flexible hinge, material and geometric dimension were chosen reasonably and the security check was carried out. Finally, vibration simulation performance was carried out by using ADAMS software, and simulation result shows that the design of micro-vibration platform is feasible.