2997294

Atom Probe Analysis And Field Emission Studies Of Silicon

King, R.A. ; Mackenzie, R.A.D. ; Smith, G.D.W. ; Cade, N.A.

University of Oxford

1993

12-15 Jul 1993

32

33

Atom lasers; Atomic beams; Atomic layer deposition; Atomic measurements; Composite materials; Optical pulses; Pollution measurement; Probes; Silicon; Surface emitting lasers;

English

ieee

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

0-7803-0852-2

conf

10.1109/IVMC.1993.700256

700256