DocumentCode
2997294
Title
Atom Probe Analysis And Field Emission Studies Of Silicon
Author
King, R.A. ; Mackenzie, R.A.D. ; Smith, G.D.W. ; Cade, N.A.
Author_Institution
University of Oxford
fYear
1993
fDate
12-15 Jul 1993
Firstpage
32
Lastpage
33
Keywords
Atom lasers; Atomic beams; Atomic layer deposition; Atomic measurements; Composite materials; Optical pulses; Pollution measurement; Probes; Silicon; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700256
Filename
700256
Link To Document