Title :
Surface Modification Of Si Field Emitter By Cheahcal Conversion To SiC TRW Film Coating
Author :
Liu, J. ; Son, U.T. ; Stepanova, A.N. ; Christensen, K.N. ; Bachmann, K.J. ; Givargizov, E.I. ; Hren, J.J.
Author_Institution :
North Carolina State University
Keywords :
Chemicals; Cleaning; Coatings; Heating; Lattices; Oxidation; Semiconductor films; Silicon carbide; Substrates; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700258
