Surface Modification Of Si Field Emitter By Cheahcal Conversion To SiC TRW Film Coating

Author

Liu, J. ; Son, U.T. ; Stepanova, A.N. ; Christensen, K.N. ; Bachmann, K.J. ; Givargizov, E.I. ; Hren, J.J.

Author_Institution

North Carolina State University

fYear

1993

fDate

12-15 Jul 1993

Firstpage

Lastpage

Keywords

Chemicals; Cleaning; Coatings; Heating; Lattices; Oxidation; Semiconductor films; Silicon carbide; Substrates; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

DOI

10.1109/IVMC.1993.700258

Filename

700258

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