Title :
On-the-fly characterization of NBTI in ultra-thin gate oxide PMOSFET´s
Author :
Denais, M. ; Parthasarathy, C. ; Ribes, G. ; Rey-Tauriac, Y. ; Revil, N. ; Bravaix, A. ; Huard, V. ; Perrier, F.
Author_Institution :
STMicroekctronics, Philips Semicond., Crolles, France
Abstract :
We propose a new methodology to characterize the negative bias temperature instability (NBTI) degradation without inherent recovery. The extracted parameters are the linear drain current, the threshold voltage and the transconductance. We compare the new and the usual methodologies and show a logarithmic time dependence of both the degradation and the recovery. The hole trapping (detrapping) is directly correlated to the VT degradation (recovery), and plays the main role in the NBTI in ultra-thin gate-oxide PMOSFET´s.
Keywords :
MOSFET; hole traps; integrated circuit reliability; NBTI; drain current; hole trapping; negative bias temperature instability degradation; on-the-fly characterization; threshold voltage; transconductance parameter; ultra-thin gate oxide PMOSFET; Current measurement; Degradation; MOSFET circuits; Niobium compounds; Pulse measurements; Stress measurement; Time measurement; Titanium compounds; Transconductance; Voltage;
Conference_Titel :
Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
Print_ISBN :
0-7803-8684-1
DOI :
10.1109/IEDM.2004.1419080