Title :
Miniature SAW Device for RF-Wireless Applications Using MEMS Technology
Author :
Zaki, Amal ; Elsimary, Hamed ; Zaghloul, Mona
Author_Institution :
Electron. Res. Inst., Cairo
Abstract :
A miniature SAW device is designed and fabricated at 1 GHz for wireless communication system. A 5 mum thin film of ZnO is successfully deposited using RF sputtering technique on PECVD SiO2 layer of 1 mum on top of Si wafer under various operating conditions. The c-axis oriented ZnO film exhibit a sharp diffraction peak corresponding to the (002) reflection at 2thetas=34.42. The fabrication process utilizing the MEMS technology of the SAW device is described simulation of the RF SAW filter is performed. Measurements and experimental work are presented for the RF SAW device.
Keywords :
II-VI semiconductors; UHF filters; X-ray diffraction; acoustic microwave devices; elemental semiconductors; micromechanical devices; plasma CVD; radiocommunication; semiconductor thin films; silicon; silicon compounds; sputter deposition; surface acoustic wave filters; zinc compounds; MEMS technology; PECVD; RF SAW device; RF SAW filter simulation; RF sputtering technique; RF-wireless applications; SiO2-Si; XRD; ZnO; diffraction peak value; fabrication process; frequency 1 GHz; miniature SAW device design; size 1 mum; size 5 mum; wireless communication system; zinc oxide thin film deposition; Diffraction; Micromechanical devices; Optical films; Radio frequency; Reflection; Semiconductor thin films; Sputtering; Surface acoustic wave devices; Wireless communication; Zinc oxide;
Conference_Titel :
Circuits and Systems, 2006. MWSCAS '06. 49th IEEE International Midwest Symposium on
Conference_Location :
San Juan
Print_ISBN :
1-4244-0172-0
Electronic_ISBN :
1548-3746
DOI :
10.1109/MWSCAS.2006.382220
