Micro-hotplates for thermal characterisation of structural materials of MEMS

Author

Fürjes, P. ; Csíkvári, P. ; Bársony, I. ; Dücsö, Cs

Author_Institution

Res. Inst. for Tech. Phys. & Mater. Sci. -MFA, Budapest

fYear

2007

fDate

17-19 Sept. 2007

Firstpage

184

Lastpage

188

Abstract

Accurate knowledge of mechanical and thermal properties of structural materials used in MEMS is essential for optimum geometric and functional design. The extraction of precise physical properties is rather complicated due to the size effects, the complexity of the structures and the variations of formation processes. This work is intended to determine the thermal properties of silicon-nitride and diamond layers applied in thermal sensor structures by analyzing thermal responses of a multilayer micro-heater structure.

Keywords

diamond; heat measurement; microsensors; multilayers; silicon compounds; size effect; MEMS; formation processes; mechanical properties; micro-hotplates; multilayer microheater structure; size effects; structural materials; thermal characterisation; thermal properties; thermal responses; thermal sensor structures; Chemical sensors; Chemical vapor deposition; Etching; Micromechanical devices; Physics; Plasma temperature; Silicon; Thermal conductivity; Thermal sensors; Thermal stresses; material properties; micro-heater; thermal analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal Investigation of ICs and Systems, 2007. THERMINIC 2007. 13th International Workshop on

Conference_Location

Budapest

Print_ISBN

978-2-35500-002-7

Type

conf

DOI

10.1109/THERMINIC.2007.4451774

Filename

4451774