OPC-Aware Routing Reconstruction for OPE Reduction

In this paper, given a set of routed nets on the routing grids, based on the concept of optical effects and the computation of OPE for any routing grid, any routed net can be reconstructed to reduce total OPE by using the reassignment of the Steiner points and the original routing path. Furthermore, by using the concept of the diffusion process for all the routed nets, all the routed nets can be reconstructed to avoid possible feature collision in post-layout OPC and reduce total OPE on the routing grids. The experimental results show that our proposed reconstruction approach reduces 22%~38% total OPE of all the routed nets on the routing grids for the tested examples.