DocumentCode
3000411
Title
Low Work Function Suspended Silicon Field Fmssion Tips With Integrated Lateral Resistor And Suspended Gate Electrode
Author
Das, John H. ; Spallas, James P. ; MacDonald, Noel C.
Author_Institution
Cornell University
fYear
1993
fDate
12-15 Jul 1993
Firstpage
58
Lastpage
59
Keywords
Apertures; Electrodes; Resistors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700272
Filename
700272
Link To Document