DocumentCode

3000560

Title

A Study And Failure Analysis Of Electron Emission From A Single Tip Cathode In Microdiode Structures

Author

Jiang, Jack C. ; White, Robb C.

Author_Institution

Columbia University

fYear

1993

fDate

12-15 Jul 1993

Firstpage

60

Lastpage

61

Keywords

Anodes; Breakdown voltage; Cathodes; Electric breakdown; Electron emission; Etching; Failure analysis; Resistors; Rough surfaces; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

conf

DOI

10.1109/IVMC.1993.700273

Filename

700273