Title :
A Study And Failure Analysis Of Electron Emission From A Single Tip Cathode In Microdiode Structures
Author :
Jiang, Jack C. ; White, Robb C.
Author_Institution :
Columbia University
Keywords :
Anodes; Breakdown voltage; Cathodes; Electric breakdown; Electron emission; Etching; Failure analysis; Resistors; Rough surfaces; Silicon;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700273
