DocumentCode

3001243

Title

Electron Beam Stimulated Deposition For FEA Fabrication

Author

Shaw, J.L. ; Gray, H.F.

Author_Institution

Naval Research Laboratory

fYear

1993

fDate

12-15 Jul 1993

Firstpage

64

Lastpage

64

Keywords

Apertures; Cooling; Electron beams; Fabrication; Iron; Laboratories; Microscopy; Reflective binary codes; Substrates; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

conf

DOI

10.1109/IVMC.1993.700276

Filename

700276