Device fabrication scheme for evaporated SPC poly-Si thin-film solar cells on glass (EVA)

Author

Kunz, Oliver ; Ouyang, Zi ; Wong, Johnson ; Aberle, Armin G.

Author_Institution

Photovoltaics Centre of Excellence, Univ. of New South Wales, Sydney, NSW

fYear

2008

fDate

July 28 2008-Aug. 1 2008

Firstpage

289

Lastpage

292

Abstract

Polycrystalline silicon thin-film solar cells on glass obtained by solid phase crystallisation (SPC) of PECVD-deposited a-Si have good photovoltaic efficiency. In this paper we present a functioning device fabrication scheme for equivalent solar cells made from evaporated SPC poly-Si films (EVA). Respectable efficiencies of above 4% are achieved for both p-type and n-type EVA solar cells on planar glass superstrates. The various hurdles that had to be passed to achieve these results are described.

Keywords

chemical vapour deposition; elemental semiconductors; semiconductor thin films; silicon; solar cells; PECVD; Si; device fabrication scheme; evaporated SPC poly-Si thin-film solar cells; functioning device fabrication scheme; glass; photovoltaic efficiency; polycrystalline silicon thin-film solar cells; solid phase crystallisation; Crystallization; Fabrication; Glass; Photovoltaic cells; Photovoltaic systems; Semiconductor thin films; Silicon; Solar power generation; Solids; Thin film devices; device fabrication; metallisation; poly-silicon; shunting; thin-film solar cells;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials and Devices, 2008. COMMAD 2008. Conference on

Conference_Location

Sydney, SA

ISSN

1097-2137

Print_ISBN

978-1-4244-2716-1

Electronic_ISBN

1097-2137

Type

conf

DOI

10.1109/COMMAD.2008.4802149

Filename

4802149