• DocumentCode
    3002215
  • Title

    Demonstration of Silicon Microdisk Resonators Compatible with Active Integration: Ultra-high Q and Efficient Waveguide-Resonator Coupling

  • Author

    Soltani, Mohammad ; Yegnanarayanan, Siva ; Adibi, Ali

  • Author_Institution
    Georgia Inst. of Technol., Atlanta
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Silicon-on-insulator microdisk resonators with efficient planar-integrated input-output coupling are demonstrated. Two structures of fully-etched and partially-etched microdisk-on- substrate, compatible with active integration are fabricated and compared. Experimental quality factors about 2.5 times 106 and critical coupling are observed.
  • Keywords
    Q-factor; integrated optics; micro-optics; microcavities; optical resonators; optical waveguides; silicon-on-insulator; Si; efficient planar-integrated input-output coupling; silicon-on-insulator microdisk resonators; ultra-high Q; waveguide-resonator coupling; Fabrication; Integrated optics; Optical devices; Optical refraction; Optical resonators; Optical variables control; Optical waveguides; Q factor; Silicon on insulator technology; Tellurium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452438
  • Filename
    4452438
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3002215