Title :
Effect of Pulse Shaping on Silicon Micromachining Monitored by Laser Induced Breakdown Spectroscopy and Surface Second Harmonic Generation
Author :
Gunaratne, Tissa C. ; Zhu, Xin ; Lozovoy, Vadim ; Dantus, Marcos
Author_Institution :
Michigan State Univ., East Lansing
Abstract :
Pulse shaping on silicon micromachining is explored using laser induced breakdown spectroscopy and surface second harmonic generation as diagnostics. The morphology of ablated holes for different shaped pulses will be discussed.
Keywords :
laser ablation; micromachining; optical harmonic generation; optical pulse shaping; silicon; ablated hole morphology; laser induced breakdown spectroscopy; pulse shaping; silicon micromachining; surface second harmonic generation; Electric breakdown; Frequency conversion; Micromachining; Monitoring; Optical pulse shaping; Pulse shaping methods; Silicon; Spectroscopy; Surface emitting lasers; Surface morphology;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452446
