Title :
Design and performance of a SAW ladder-type filter at 3.15 GHz using SAW mass production technology
Author :
Hollerweger, F. ; Springer, A. ; Weigell, R. ; Ruile, W. ; Thomas, R. ; Berek, S. ; Guglielmi, M.
Author_Institution :
Inst. of Commun. & Inf. Eng., Linz Univ., Austria
Abstract :
To meet the increasing demand of high performance filters in GHz radio communication systems, we have improved the design techniques and fabrication processes for SAW devices. The standard optical projection printing technique based on i-line lithography used for mass-production was optimized, thus attaining a linewidth of 0.3 microns. As a first SAW device prototype we designed and fabricated a ladder type bandpass filter from 42/spl deg/ rotYX-LiTaO/sub 3/ substrate, at 3.15 GHz having a bandwidth of close to 200 MHz and a minimum insertion loss of 1.7 dB.
Keywords :
band-pass filters; ladder filters; microwave filters; radio equipment; surface acoustic wave filters; 0.3 micron; 1.7 dB; 200 MHz; 3.15 GHz; 42/spl deg/ rotYX-LiTaO/sub 3/ substrate; GHz radio communication systems; SAW ladder-type filter; SAW mass production technology; bandwidth; design; fabrication; high performance filters; i-line lithography; ladder type bandpass filter; linewidth; minimum insertion loss; standard optical projection printing technique; Band pass filters; Lithography; Optical device fabrication; Optical devices; Optical filters; Printing; Prototypes; Radio communication; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.780220
