• DocumentCode
    3003260
  • Title

    Self-aligned carbon nanotube transistors with novel chemical doping

  • Author

    Chen, Jia ; Klinke, Christian ; Afzali, Ali ; Chan, Kevin ; Avouris, Phaedon

  • Author_Institution
    IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
  • fYear
    2004
  • fDate
    13-15 Dec. 2004
  • Firstpage
    695
  • Lastpage
    698
  • Abstract
    We report an unconventional chemical p- and n- doping scheme utilizing novel materials and a charge transfer mechanism to obtain air-stable, self-aligned, unipolar carbon nanotube transistors. This scheme in addition to introducing the tunability of the threshold voltage Vth, increases the drive current 2-3 orders of magnitude, transforms CNFET from ambipolar to unipolar, suppresses minority carrier injection and yields an excellent Ion/Ioff ratio of 106.
  • Keywords
    carbon nanotubes; charge exchange; field effect transistors; semiconductor doping; charge transfer mechanism; chemical doping; minority carrier injection; self-aligned carbon nanotube transistors; Carbon nanotubes; Charge transfer; Chemicals; Doping; FETs; Fabrication; Ion implantation; Lattices; Organic materials; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
  • Print_ISBN
    0-7803-8684-1
  • Type

    conf

  • DOI
    10.1109/IEDM.2004.1419264
  • Filename
    1419264