DocumentCode
3004057
Title
Modeling of the millimeter-wave behavior of MEMS capacitive switches
Author
Vietzorreck, L.
Author_Institution
Lehrstuhl fur Hochfrequenztech., Tech. Univ. Munchen, Germany
Volume
4
fYear
1999
fDate
13-19 June 1999
Firstpage
1685
Abstract
The analysis of the millimeter-wave behavior of micromechanical capacitive switches by the method of lines (MoL) is presented. For this purpose the method of lines is extended for consideration of very thin lossy metallic and dielectric layers without increasing the numerical effort by modifying the difference operators in a suitable way. The calculated results of a metal membrane switch show very good agreement to measured data.
Keywords
method of lines; micromechanical devices; microwave switches; millimetre wave devices; MEMS capacitive switch; dielectric layer; difference operator; metal membrane; method of lines; millimeter-wave device; numerical model; Biomembranes; Communication switching; Coplanar waveguides; Dielectric losses; Micromechanical devices; Millimeter wave technology; Phased arrays; Radio frequency; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location
Anaheim, CA, USA
Print_ISBN
0-7803-5135-5
Type
conf
DOI
10.1109/MWSYM.1999.780295
Filename
780295
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