DocumentCode
3004815
Title
Evanescent microwave probes using coplanar waveguide and stripline for super-resolution imaging of materials
Author
Ponchak, E. ; Akinwande, D. ; Ciocan, R. ; LeClair, S.R. ; Tabib-Azar, M.
Author_Institution
NASA Lewis Res. Center, Cleveland, OH, USA
Volume
4
fYear
1999
fDate
13-19 June 1999
Firstpage
1859
Abstract
An evanescent field microwave imaging probe based on half-wavelength, microwave transmission line resonators is described. Optimization of the probe tip design, the coupling gap, and the data analysis has resulted in images of metal lines on semiconductor substrates with 2.6 /spl mu/m spatial resolution and a minimum detectable line width of 0.4 /spl mu/m at 1 GHz.
Keywords
UHF detectors; UHF measurement; coplanar waveguides; image resolution; microscopes; microstrip resonators; microwave imaging; 1 GHz; coplanar waveguide; coupling gap; data analysis; evanescent field microwave imaging probe; evanescent microwave probes; materials; metal lines; microwave transmission line resonators; optimization; probe tip design; semiconductor substrates; stripline; super-resolution imaging; Coplanar transmission lines; Coplanar waveguides; Couplings; Data analysis; Design optimization; Microwave imaging; Probes; Semiconductor waveguides; Stripline; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location
Anaheim, CA, USA
Print_ISBN
0-7803-5135-5
Type
conf
DOI
10.1109/MWSYM.1999.780335
Filename
780335
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