Title :
A micromachined RF microswitch applicable to phased-array antennas
Author :
Suzuki, K. ; Chen, S. ; Marumoto, T. ; Ara, Y. ; Iwata, R.
Author_Institution :
LSI Basic Res. Lab., NEC Corp., Ibaraki, Japan
Abstract :
A mechanical microswitch has been fabricated by single crystal silicon bulk micromachining on a glass substrate. The mechanical part of the device has superior mechanical reliability and can be applied to a phased-array antenna, since the glass substrate can be easily extended to a large area, accommodating a large number of elements on it. A fabricated device was measured to have less than 0.2 dB of on-state insertion loss and higher than 13 dB of off-state isolation at 30 GHz.
Keywords :
antenna accessories; antenna phased arrays; micromachining; microwave antenna arrays; microwave switches; 0.2 dB; 30 GHz; RF microswitch; Si; bulk micromachining; glass substrate; insertion loss; mechanical reliability; mechanical switch; microwave communication; off-state isolation; phased array antenna; single crystal silicon; Circuits; Communication switching; Dielectric substrates; Gallium arsenide; Glass; Insertion loss; Microswitches; Phase shifters; Radio frequency; Switches;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.780350
