DocumentCode

3005131

Title

Fabrication Of Lateral Triode With Comb-shaped Field-emitter Arrays

Author

Itoh, Junji ; Ushiki, Kazunari ; Tsuburaya, Kazuhiko ; Kanemaru, Seigo

Author_Institution

Tokai University

fYear

1993

fDate

12-15 Jul 1993

Firstpage

99

Lastpage

100

Keywords

Anodes; Fabrication; Field emitter arrays; Laboratories; Microelectronics; Niobium; Resistors; Shape measurement; Transconductance; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

conf

DOI

10.1109/IVMC.1993.700298

Filename

700298