• DocumentCode
    3005217
  • Title

    High-Speed MEMS Micromirror Switching

  • Author

    Nielson, Gregory N. ; Olsson, Roy H., III ; Resnick, Paul R. ; Spahn, Olga Blum

  • Author_Institution
    Sandia Nat. Lab., Albuquerque
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report a high-speed MEMS micromirror that switches in 225 ns using 22 V. Switch repetition rates of up to 100 kHz have been demonstrated. These performance characteristics significantly extend the application space of micromirrors.
  • Keywords
    micromirrors; microswitches; optical switches; MEMS micromirror switching; switching speed; voltage 22 V; Electrodes; High speed optical techniques; Laboratories; Micromechanical devices; Micromirrors; Optical switches; Quantum computing; Telecommunication switching; Testing; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452612
  • Filename
    4452612
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3005217