Fabrication Of On-chip Anode Of Vacuum Micro-diode

Author

Yoon, Yeong J. ; Yicheng Lu ; Lalevic, B. ; Zeto, Robert ; Piekars, R. ; Widuta, W. ; Zakar, E. ; Conrad, J.

Author_Institution

Rutgers University

fYear

1993

fDate

12-15 Jul 1993

Firstpage

101

Lastpage

102

Keywords

Anodes; Cathodes; Electron emission; Fabrication; Ion implantation; Laboratories; Low voltage; Microelectronics; Resists; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

DOI

10.1109/IVMC.1993.700299

Filename

700299

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