• DocumentCode
    3006113
  • Title

    Table top extreme ultraviolet holography

  • Author

    Wachulak, P.W. ; Bartels, R.A. ; Marconi, M.C. ; Menoni, C.S. ; Rocca, J.J.

  • Author_Institution
    Colorado State Univ., Fort Collins
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Table top holography with EUV laser was demonstrated. The hologram recorded in a photoresist was digitized with an AFM. The image was reconstructed achieving 380 nm spatial resolution determined using wavelet analysis and image correlation.
  • Keywords
    atomic force microscopy; holography; photoresists; ultraviolet sources; AFM; EUV laser; hologram; photoresist; spatial resolution; table top extreme ultraviolet holography; Atomic force microscopy; High-resolution imaging; Holographic optical components; Holography; Image reconstruction; Optical imaging; Pump lasers; Resists; Spatial resolution; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452662
  • Filename
    4452662
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3006113