Title :
2010 UGIM Table of contents
fDate :
June 28 2010-July 1 2010
Abstract :
The following topics are dealt with: nanoelectronics; microfabrication; microelectronics; nanofabrication; carbon nanotubes; and mems devices.
Keywords :
carbon nanotubes; microfabrication; micromechanical devices; nanoelectronics; nanofabrication; MEMS devices; carbon nanotubes; microelectronics; microfabrication; nanoelectronics; nanofabrication;
Conference_Titel :
Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry
Conference_Location :
West Lafayette, IN
Print_ISBN :
978-1-4244-4731-2
DOI :
10.1109/UGIM.2010.5508859
