Title :
Transparent Thin-Film Characterization by Using Differential Optical Sectioning Interference Microscopy
Author :
Wang, Chun-Chieh ; Jian, Hong-Jhang ; Lee, Chau-Hwang
Author_Institution :
Nat. Chung Cheng Univ., Chia-Yi
Abstract :
Differential optical sectioning interference microscopy is proposed for measuring the refractive index (n) and thickness (d) of transparent thin films with sub-micrometer lateral resolution. We demonstrate this technique with a 100-nm SiO2 layer on Si.
Keywords :
optical microscopy; silicon compounds; thin films; transparency; SiO2; differential optical sectioning interference microscopy; refractive index; size 100 nm; sub micrometer lateral resolution; thickness; transparent thin film characterization; Interference; Optical films; Optical filters; Optical microscopy; Optical refraction; Optical sensors; Optical variables control; Refractive index; Transistors; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452706
