DocumentCode
3007612
Title
Design methodology of piezoresonant sensors construction with a modulated interelectrode gap
Author
Taranchuk, Alla ; Pidchenko, Segey ; Skovryha, Olena
Author_Institution
Dept. of Radioelectron. Devices & Telecommun., Khmelnytsky Nat. Univ., Khmelnytsky, Ukraine
fYear
2015
fDate
21-24 April 2015
Firstpage
374
Lastpage
377
Abstract
This paper represents constructive and mechanical schemes of piezoresonant sensor, considers its basic electrical characteristics and shows the necessity of taking into account the non-parallelism of the electrodes while projecting sensors with modulated interelectrode gap.
Keywords
electrodes; piezoelectric devices; resonance; sensors; design methodology; electrical characteristics; modulated interelectrode gap; nonparallelism; piezoresonant sensors construction; Electrodes; Frequency modulation; Mechanical sensors; Resonant frequency; Sensor phenomena and characterization; Sensor systems; modulated interelectrode gap; modulation characteristic; non-parallelism of the electrodes; piezoelectric element; sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics and Nanotechnology (ELNANO), 2015 IEEE 35th International Conference on
Conference_Location
Kiev
Type
conf
DOI
10.1109/ELNANO.2015.7146913
Filename
7146913
Link To Document