• DocumentCode
    3007719
  • Title

    Demonstration of a Scalable Microfabrication Process for Arrayed Electrowetting Microprisms

  • Author

    Hou, Linlin ; Heikenfeld, Jason

  • Author_Institution
    Novel Devices Lab., Univ. of Cincinnati, Cincinnati, OH, USA
  • fYear
    2010
  • fDate
    June 28 2010-July 1 2010
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    A challenging non-planar scalable microfabrication process of arrayed electrowetting microprisms is reported. And an ~1500 element array of ~150 μm- size electrowetting microprisms is demonstrated.
  • Keywords
    Beam steering; Electrodes; Electrooptic devices; Fabrication; Holographic optical components; Holography; Laser radar; Liquid crystal displays; Optical arrays; Optical refraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro/Nano Symposium (UGIM), 2010 18th Biennial University/Government/Industry
  • Conference_Location
    West Lafayette, IN, USA
  • ISSN
    0749-6877
  • Print_ISBN
    978-1-4244-4731-2
  • Electronic_ISBN
    0749-6877
  • Type

    conf

  • DOI
    10.1109/UGIM.2010.5508933
  • Filename
    5508933
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3007719