DocumentCode
3008250
Title
Femtosecond Laser Nanomachining Applications in Fused Silica
Author
Taylor, Rod S. ; Hnatovsky, Cyril ; Simova, Eli ; Pattathil, Rajeev ; Liu, Jiaren ; Rayner, David M. ; Corkum, Paul B.
Author_Institution
Nat. Res. Council of Canada, Ottawa
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
Focused femtosecond laser light can produce beautifully arrayed self-organized nanocracks inside fused silica. These nanocracks provide a unique capability for nanomachining micro- and nanofluidic channels, nanoporous capillaries and rewritable data storage elements.
Keywords
high-speed optical techniques; laser beam machining; nanotechnology; femtosecond laser nanomachining; fused silica; microfluidic channels; nanocracks; nanofluidic channels; nanoporous capillaries; rewritable data storage elements; Chemical lasers; Etching; Laser applications; Laser beams; Optical arrays; Optical materials; Optical pulses; Optical refraction; Silicon compounds; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4452782
Filename
4452782
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