DocumentCode
3008959
Title
Dual Wavelength Femtosecond Laser Materials Processing
Author
Kamata, Masanao ; Tsujikawa, Susumu ; SUMIYOSHI, Tetusmi ; Sekita, Hitoshi
Author_Institution
Cyber Laser Inc., Tokyo
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
2
Abstract
Femtosecond laser ablation using the combination of 260 nm pulses and 780 nm pulses is explored for the high speed and high quality selected removal of insulating layers.
Keywords
high-speed optical techniques; insulating materials; laser ablation; dual wavelength femtosecond laser materials processing; femtosecond laser ablation; high quality selected removal; high speed processing; insulating layers; wavelength 260 nm; wavelength 780 nm; Absorption; Delay effects; Insulation; Laser ablation; Materials processing; Optical materials; Optical pulses; Pulse amplifiers; Ultrafast electronics; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4452824
Filename
4452824
Link To Document