DocumentCode

3008991

Title

6402-matrix Silicon Field Emitter Array

Author

Betsui, Keiichi ; Toyoda, Osamu ; Ishii, Tomoyuki ; Kondo, Nobuyoshi ; Fukuta, Shin Ya

Author_Institution

Fujitsu Laboratories Ltd.

fYear

1993

fDate

12-15 Jul 1993

Firstpage

137

Lastpage

138

Keywords

Etching; Field emitter arrays; Insulation; Ion implantation; Metal-insulator structures; Microelectronics; Oxidation; Pixel; Silicon; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International

Print_ISBN

0-7803-0852-2

Type

conf

DOI

10.1109/IVMC.1993.700318

Filename

700318