Title :
Wafer Scale Texturing of LiNbO3
Author :
Sivan, Vijay ; Holland, Anthony ; Bui, Lam ; Priest, Timothy ; Mitchell, Arnan
Author_Institution :
RMIT Univ., Melbourne
Abstract :
We report a novel technique for micro texturing of LiNbO3. Well-defined raised ridges and etched trenches are demonstrated. This technique is suitable for the realization of surface relief gratings and photonic crystals.
Keywords :
diffraction gratings; diffusion; electrochemical analysis; etching; lithium compounds; micro-optics; optical fabrication; optical materials; optical waveguides; photonic crystals; ridge waveguides; surface texture; titanium; LiNbO3; etched trenches; microtexturing technique; photonic crystals; surface relief gratings; titanium diffusion process; wafer scale texturing; Atomic force microscopy; Gratings; Nonlinear optics; Optical devices; Optical surface waves; Optical waveguides; Photonic crystals; Strips; Substrates; Wet etching;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452887
