• DocumentCode
    3010001
  • Title

    Wafer Scale Texturing of LiNbO3

  • Author

    Sivan, Vijay ; Holland, Anthony ; Bui, Lam ; Priest, Timothy ; Mitchell, Arnan

  • Author_Institution
    RMIT Univ., Melbourne
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report a novel technique for micro texturing of LiNbO3. Well-defined raised ridges and etched trenches are demonstrated. This technique is suitable for the realization of surface relief gratings and photonic crystals.
  • Keywords
    diffraction gratings; diffusion; electrochemical analysis; etching; lithium compounds; micro-optics; optical fabrication; optical materials; optical waveguides; photonic crystals; ridge waveguides; surface texture; titanium; LiNbO3; etched trenches; microtexturing technique; photonic crystals; surface relief gratings; titanium diffusion process; wafer scale texturing; Atomic force microscopy; Gratings; Nonlinear optics; Optical devices; Optical surface waves; Optical waveguides; Photonic crystals; Strips; Substrates; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452887
  • Filename
    4452887
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3010001