Title :
Photonic Band Gap Synthesis by Optical Phase Mask Lithography
Author :
Chan, Timothy Y.M. ; Toader, Ovidiu ; John, Sajeev
Author_Institution :
Univ. of Toronto, Toronto
Abstract :
We provide a simple and efficient approach for fabricating diamond architecture photonic crystals using single-exposure, single-beam, optical interference lithography based on diffraction of light through an optical phase mask.
Keywords :
diamond; light diffraction; phase shifting masks; photolithography; photonic band gap; photonic crystals; diamond architecture photonic crystals; light diffraction; optical interference lithography; optical phase mask lithography; photonic band gap synthesis; Holographic optical components; Holography; Lithography; Optical diffraction; Optical materials; Optical refraction; Optical variables control; Photonic band gap; Photonic crystals; Silicon;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452889
