DocumentCode
3011131
Title
IC performance prediction from electrical test measurements
Author
Boskin, Eric D. ; Spanos, Costas J. ; Korsh, George
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
fYear
1992
fDate
15-16 Jun 1992
Firstpage
13
Lastpage
17
Abstract
A model for integrated circuit (IC) binning has been built using measurements collected on a high-volume manufacturing line. This model uses electrical measurements collected before packaging in order to predict the high-speed performance of manufactured parts before final test. A small set of measurable parameters responsible for the variation in fabricated parts was identified. The statistically significant, linear performance prediction model was built using data from a 1-Mbit CMOS EPROM production line. The applications of the model include aiding the packaging decision, production planning and scheduling, process characterization, and control and design for manufacturability
Keywords
CMOS integrated circuits; EPROM; VLSI; integrated circuit testing; packaging; production testing; quality control; semiconductor process modelling; 1 Mbit; CMOS; EPROM; IC binning; IC performance prediction; ULSI; VLSI; design for manufacturability; electrical measurements; electrical test measurements; high-speed performance; high-volume manufacturing line; linear performance prediction model; measurable parameters; measurement before packaging; model; packaging decision; process characterization; production line; production planning; scheduling; Circuit testing; Electric variables measurement; Integrated circuit manufacture; Integrated circuit measurements; Integrated circuit modeling; Integrated circuit testing; Packaging; Predictive models; Semiconductor device modeling; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Science Symposium, 1992. ISMSS 1992., IEEE/SEMI International
Conference_Location
San Francisco, CA
Print_ISBN
0-7803-0680-5
Type
conf
DOI
10.1109/ISMSS.1992.197628
Filename
197628
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