Title :
Metallic-Contamination-Induced Optical Loss in Silicon Microphotonic Waveguides
Author :
Barwicz, Tymon ; Holzwarth, Charles W. ; Rakich, Peter T. ; Popovic, Milos A. ; Ippen, Erich I. ; Smith, Henry I.
Author_Institution :
IBM T.J. Watson Res. Center, Yorktown Heights
Abstract :
We report on optical loss reaching 100 dB/cm observed in Si wire waveguides defined by reactive-ion etching in the proximity of metals with a low temperature of silicide formation.
Keywords :
contamination; micro-optics; optical fibre losses; silicon; sputter etching; Si; Si wire waveguides; metallic-contamination-induced optical loss; reactive-ion etching; silicide formation; silicon microphotonic waveguides; Atom optics; Etching; Nickel; Optical attenuators; Optical losses; Optical scattering; Optical waveguides; Propagation losses; Silicides; Silicon;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452985
