DocumentCode :
3011872
Title :
Nano-channel on quartz-chip laboratory using single molecular detectable thermal lens microscope
Author :
Matsumoto, K. ; Kawakami, T. ; Nakao, M. ; Hatamura, Y. ; Kitamori, T. ; Sawada, T.
Author_Institution :
Dept. of Eng. Synthesis, Tokyo Univ., Japan
fYear :
1998
fDate :
25-29 Jan 1998
Firstpage :
127
Lastpage :
130
Abstract :
To execute chemical experiments with less sample volume, shorter experiment time and higher measurement resolution, the authors are developing a quartz-chip laboratory with a thermal lens microscope. However, turbulence of fluid flow causes double-count measurement error of microparticles. To increase preciseness of the measurement, a narrow lamina-flow channels called “nano-channel” is employed. Nano-channels of 50 and 900 nm width, flat-structured ball mixer and bubble pump/valve were designed and fabricated on a quartz substrate to estimate their feasibilities
Keywords :
chemical analysis; fluid dynamics; micromechanical devices; microscopes; nanotechnology; photothermal effects; 50 to 900 nm; SiO2; bubble pump/valve; chemical experiments; double-count measurement error; flat-structured ball mixer; fluid flow; lamina-flow channels; microparticles; nano-channel; preciseness; quartz substrate; quartz-chip laboratory; single molecular detectable thermal lens microscope; thermal lens microscop; turbulence; Chemicals; Fluid flow; Laboratories; Lenses; Measurement errors; Microscopy; Pumps; Thermal lensing; Time measurement; Volume measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on
Conference_Location :
Heidelberg
ISSN :
1084-6999
Print_ISBN :
0-7803-4412-X
Type :
conf
DOI :
10.1109/MEMSYS.1998.659741
Filename :
659741
Link To Document :
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