Miniaturizing Fourier Transform Spectrometer With an Electrothermal Micromirror

Author

Wei Wang ; Samuelson, Sean R. ; Jiapin Chen ; Huikai Xie

Author_Institution

Res. Inst. of Micro/Nano Technol., Shanghai Jiao Tong Univ., Shanghai, China

Volume

27

Issue

13

fYear

2015

fDate

July1, 1 2015

Firstpage

1418

Lastpage

1421

Abstract

An amplitude-division Fourier transform spectroscopy system has been constructed. The system design hinges on an electrothermally actuated micromirror with large piston motion. The micromirror is composed of electrothermal mesh actuators and can generate up to 95 μm usable linear optical path difference of the system at only 0.8 V_dc. A custom electrical system is developed to control the micromirror and data processing is implemented to extract the spectrum from interferograms. The system can achieve a spectral resolution of 5 nm at 532 nm.

Keywords

Fourier transform optics; Fourier transform spectrometers; micro-optomechanical devices; micromirrors; optical design techniques; Fourier transform spectrometer; amplitude-division Fourier transform spectroscopy system; data processing; electrical system; electrothermal mesh actuators; electrothermally actuated micromirror; interferograms; linear optical path difference; piston motion; spectral resolution; wavelength 532 nm; Actuators; Fourier transforms; Green products; Micromechanical devices; Micromirrors; Pistons; Electrothermal actuator; Fourier Transform Spectroscopy; Fourier transform spectroscopy; MEMS Mirror; MEMS mirror; electrothermal actuator;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2015.2423637

Filename

7087333