Integrated LTCC chamber with optical ports and thermal control elements

Author

Bembnowicz, Pawel ; Nowakowska, Dorota ; Golonka, Leszek J.

Author_Institution

Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland

fYear

2009

fDate

13-17 May 2009

Firstpage

1

Lastpage

4

Abstract

This document shows the microsystem, made of LTCC (Low Temperature Co-fired Ceramic) material, for biochemical and chemical applications. The structure consists of a chamber, a glass window, an inlet and an outlet, an optical waveguide, a heater and a temperature sensor. The novel LTCC-glass technology is used to build the ceramic microreactor. The additional glass elements enable real-time, optical analyses. The integrated heater and the temperature sensor allow reactor to achieve required temperature. FEA (Finite Element Analyze) is applied to optimize thermal properties of the designed chamber. Furthermore, the electronic control system is constructed in order to obtain proper temperature profile.

Keywords

ceramic packaging; ceramics; electric heating; finite element analysis; heating elements; micromechanical devices; microreactors; optical waveguides; temperature control; temperature sensors; thermal management (packaging); ceramic microreactor; electronic control system; finite element analysis; integrated heater; low temperature co-fired ceramics; optical analyses; optical ports; optical waveguide; temperature profile; temperature sensor; thermal control elements; thermal management; thermal properties; Biological materials; Biomedical optical imaging; Ceramics; Chemical elements; Glass; Integrated optics; Optical control; Optical sensors; Optical waveguides; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Technology, 2009. ISSE 2009. 32nd International Spring Seminar on

Conference_Location

Brno

Print_ISBN

978-1-4244-4260-7

Type

conf

DOI

10.1109/ISSE.2009.5207070

Filename

5207070