Micro balloon actuators for aerodynamic control

Author

Grosjean, C. ; Lee, G.B. ; Hong, W. ; Tai, Y.C. ; Ho, C.M.

Author_Institution

Caltech Micromachining Lab., California Inst. of Technol., Pasadena, CA, USA

fYear

1998

fDate

25-29 Jan 1998

Firstpage

166

Lastpage

171

Abstract

A robust, large-force, large-deflection micro balloon actuator for aerodynamic (manoeuvring) control of transonic aircraft has been developed. Using a novel process, high yield linear arrays of silicone balloons on a robust silicon substrate have been fabricated that can deflect vertically in excess of one mm. Balloon actuators have been tested under cyclic conditions to assess reliability. The actuators have been characterized in a wind tunnel to assess their suitability as aerodynamic control surfaces and flight-tested on a jet fighter to assess their resistance to varied temperatures and pressures at high velocity

Keywords

aircraft control; elemental semiconductors; mechanical testing; microactuators; silicon; silicones; transonic flow; wind tunnels; Si; aerodynamic control; aerodynamic control surfaces; cyclic conditions; high yield linear arrays; jet fighter; manoeuvring control; micro balloon actuators; pressures; reliability; silicon substrate; silicone balloons; transonic aircraft; wind tunnel; Actuators; Aerodynamics; Aerospace control; Aircraft; Robust control; Robustness; Silicon; Surface resistance; Testing; Velocity control;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on

Conference_Location

Heidelberg

ISSN

1084-6999

Print_ISBN

0-7803-4412-X

Type

conf

DOI

10.1109/MEMSYS.1998.659748

Filename

659748