Title :
Photoluminescence enhancement of Silicon-rich silicon nitride film induced by silver localized surface plasmon
Author :
Li, Dongsheng ; Cheng, Peihong ; Yang, Deren
Author_Institution :
Dept. of Mater. Sci. & Eng., Zhejiang Univ., Hangzhou
Abstract :
The photoluminescence of silicon-rich silicon nitride (SRSN) film was enhanced by coupling with the localized surface plasmon of Ag island film. It is found that the deposited Ag film induces an enhancement of excitation of SRSN film through increasing the absorption of SRSN film. Furthermore, it is demonstrated that the emission enhancement is much more decided by the excitation wavelength than by the Ag island scattering.
Keywords :
photoluminescence; silicon compounds; surface plasmons; thin films; Si3N4; excitation wavelength; photoluminescence; surface plasmon; Light scattering; Particle scattering; Photoluminescence; Plasma measurements; Plasmons; Resonance; Semiconductor films; Silicon; Silver; Sputtering;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638116
