DocumentCode
3014098
Title
Photoluminescence enhancement of Silicon-rich silicon nitride film induced by silver localized surface plasmon
Author
Li, Dongsheng ; Cheng, Peihong ; Yang, Deren
Author_Institution
Dept. of Mater. Sci. & Eng., Zhejiang Univ., Hangzhou
fYear
2008
fDate
17-19 Sept. 2008
Firstpage
116
Lastpage
118
Abstract
The photoluminescence of silicon-rich silicon nitride (SRSN) film was enhanced by coupling with the localized surface plasmon of Ag island film. It is found that the deposited Ag film induces an enhancement of excitation of SRSN film through increasing the absorption of SRSN film. Furthermore, it is demonstrated that the emission enhancement is much more decided by the excitation wavelength than by the Ag island scattering.
Keywords
photoluminescence; silicon compounds; surface plasmons; thin films; Si3N4; excitation wavelength; photoluminescence; surface plasmon; Light scattering; Particle scattering; Photoluminescence; Plasma measurements; Plasmons; Resonance; Semiconductor films; Silicon; Silver; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location
Cardiff
Print_ISBN
978-1-4244-1769-8
Electronic_ISBN
978-1-4244-1768-1
Type
conf
DOI
10.1109/GROUP4.2008.4638116
Filename
4638116
Link To Document