Title :
42 GHz waveguide germanium-on-silicon vertical PIN photodetector
Author :
Vivien, L. ; Marris-Morini, D. ; Mangeney, J. ; Crozat, P. ; Cassan, E. ; Laval, S. ; Fédéli, J.M. ; Damlencourt, JF ; Lecunff, Y.
Author_Institution :
CNRS UMR 8622, Univ. Paris-sud XI, Orsay
Abstract :
High speed, high responsivity and reliable CMOS compatible photodetectors are key elements for low cost telecommunications systems at 1.55 mum. A 42 GHz germanium on silicon vertical PIN photodetector integrated in SOI waveguide is presented.
Keywords :
CMOS integrated circuits; elemental semiconductors; germanium; integrated optics; optical waveguides; photodetectors; silicon; silicon-on-insulator; CMOS compatible photodetectors; Ge-Si; SOI waveguide; frequency 42 GHz; germanium-on-silicon vertical PIN photodetector; telecommunications systems; Bandwidth; Etching; Germanium; High speed optical techniques; Optical interconnections; Optical modulation; Optical waveguides; PIN photodiodes; Photodetectors; Silicon; germanium; integrated optics; microphotonics; photodetector; silicon-on-insulator; waveguide;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638139
