Thermoelastic analysis for freestanding micro-hotplates for micro/nano gas sensors

One of the key parts in micro/nano gas sensors is micro-hotplate (MHP). Due to the important role of MHP in gas sensors, calculating the temperature distribution and thermal stresses within MHP is strictly necessary to correctly analyse these devices. In this study, analytical solutions for the temperature field, and both radial and tangential stresses for circular MHP are obtained. Internal heat generation is incorporated in the energy equation for the MHP and different values of convection heat transfer coefficient are used at the upper and lower surfaces of the MHP. Since the analytical models for the temperature field and especially for the thermal stresses of MHP are seldom investigated in the literature, the obtained results are believed to facilitate the design and performance evaluation of MHPs.