• DocumentCode
    3015205
  • Title

    Design, fabrication, and characterization of an α-Si:H/α-SiCN multistack waveguide for electro optical modulation

  • Author

    Rao, Sandro ; Della Corte, Francesco G. ; Summonte, Caterina ; Suriano, Francesco

  • Author_Institution
    Dept. of Inf. Sci., Math., Electron. & Transportations, Mediterranea Univ., Reggio Calabria
  • fYear
    2008
  • fDate
    17-19 Sept. 2008
  • Firstpage
    279
  • Lastpage
    281
  • Abstract
    Electro-optical absorption in alpha-Si:H/alpha-SiCxNy multilayers has been studied in three different planar multistack waveguides realized by PECVD technology. Light absorption is induced at lambda=1.55 mum by carrier accumulation through the application of electric field across the multiple insulator/semiconductor device.
  • Keywords
    electro-optical modulation; elemental semiconductors; optical waveguides; plasma CVD; silicon; silicon compounds; PECVD; Si-SiCN; electro optical modulation; multiple insulator/semiconductor device; planar multistack waveguides; Absorption; Electrooptical waveguides; Nonhomogeneous media; Optical design; Optical device fabrication; Optical modulation; Optical planar waveguides; Optical waveguides; Planar waveguides; Semiconductor waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2008 5th IEEE International Conference on
  • Conference_Location
    Cardiff
  • Print_ISBN
    978-1-4244-1769-8
  • Electronic_ISBN
    978-1-4244-1768-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2008.4638172
  • Filename
    4638172
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3015205