• DocumentCode
    3015463
  • Title

    Crosstalk reduction of silicon nanowire AWG with shallow-etched grating arms

  • Author

    Kim, Duk-Jun ; Lee, Jong-Moo ; Song, Jung Ho ; Pyo, Junghyung ; Kim, Gyungock

  • Author_Institution
    Convergence & Components & Mater. Res. Lab., Electron. & Telecommun. Res. Inst. (ETRI), Daejeon
  • fYear
    2008
  • fDate
    17-19 Sept. 2008
  • Firstpage
    323
  • Lastpage
    325
  • Abstract
    The grating arms composed of silicon nanowires were shallow-etched to reduce the random phase error caused by the core width fluctuation. A fairly improved crosstalk value of 18 dB was achieved in the arrayed-waveguide grating with the on-chip loss of 3 dB.
  • Keywords
    arrayed waveguide gratings; etching; integrated optics; nanowires; optical crosstalk; optical fabrication; optical losses; silicon-on-insulator; Si-SiO2; arrayed-waveguide grating; core width fluctuation; crosstalk reduction; loss 3 dB; on-chip loss; random phase error; shallow-etched grating arms; silicon nanowire AWG; silicon-on-insulator wafer; Arm; Arrayed waveguide gratings; Crosstalk; Etching; Fluctuations; Optical interferometry; Optical waveguides; Phased arrays; Polarization; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics, 2008 5th IEEE International Conference on
  • Conference_Location
    Cardiff, Wales
  • Print_ISBN
    978-1-4244-1769-8
  • Electronic_ISBN
    978-1-4244-1768-1
  • Type

    conf

  • DOI
    10.1109/GROUP4.2008.4638187
  • Filename
    4638187