Title :
Green, self-luminescent Tb3+ doped silicon oxy-nitride microdisk on Si chip for biosensor applications
Author :
Jeong, Hoon ; Shin, Jung H. ; Sung, Gun-Yong
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon
Abstract :
We design and fabricate green, self-luminescent Tb-doped SiOxNy microdisks on Si chip for low-cost, all-Si biosensor applications. WGM was obtained via top-pumping and side-PL measurements, and obtained Q-factor was 220.
Keywords :
Q-factor; biosensors; micro-optics; microcavities; optical materials; optical pumping; optical resonators; photoluminescence; silicon compounds; terbium; whispering gallery modes; Q-factor; Si chip; SiON:Tb; Tb3+ doped silicon oxy-nitride microdisk; WGM; biosensor; self-luminescence; side-PL; top-pumping; Biosensors; Finite difference methods; Luminescence; Microcavities; Optical resonators; Optical sensors; Q factor; Resonance; Semiconductor device measurement; Silicon;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff, Wales
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638191