Optimization of partial slip surface at lubricated-MEMS

This work reports the hydrodynamic performance (load support, friction force, friction coefficient, and volume flow) generated by a partial slip surface at lubricated-MEMS. The partial slip surface is optimized so that a maximum hydrodynamic load support could be obtained. The partial slip is applied on the stationary surface, the moving surface, and both of them. It is found that if the moving surface is designed as a partial slip surface, the system is in an unsteady state and no great importance exists in engineering applications. Controlling the partial slip surface of the stationary surface can give many advanced properties compared with the traditional no-slip contact, i.e., a large fluid load support in combination with low friction coefficient. It is also shown that partial slip surface gives the highest hydrodynamic pressure in a parallel slip gap, which is helpful to improve the operation stability of the system.