A novel scale factor calibration method for a MEMS gyroscope based on virtual coriolis force

Author

Jimeng Zhang ; Chunhua He ; Yuxian Liu ; Dachuan Liu ; Qiancheng Zhao ; Zhenchuan Yang ; Guizhen Yan

Author_Institution

Shenzhen Grad. Sch., Peking Univ., Beijing, China

fYear

2015

fDate

7-11 April 2015

Firstpage

58

Lastpage

62

Abstract

This paper presents a novel scale factor calibration method for a MEMS vibratory gyroscope based on virtual Coriolis force. Frequency and amplitude programmable voltage signals generated by the system can be used to emulate the Coriolis force induced by external angular rate signals. The system contributes to the development procedure of control system for gyroscope and provides a scale factor calibration method for the digital control system of a gyroscope. The experiment results show the digital system can acquire the frequency response of gyroscope and detect the frequency response of reference virtual rate signal effectively.

Keywords

Coriolis force; calibration; digital control; frequency response; gyroscopes; micromechanical devices; vibrations; MEMS vibratory gyroscope; amplitude programmable voltage signals; angular rate signals; digital control system; frequency response; reference virtual rate signal; scale factor calibration method; virtual Coriolis force; Calibration; Digital systems; Force; Frequency measurement; Frequency response; Gyroscopes; Micromechanical devices; MEMS gyroscope; scale factor calibration; self-test; virtual Coriolis;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on

Conference_Location

Xi´an

Type

conf

DOI

10.1109/NEMS.2015.7147373

Filename

7147373