Title :
Jet rollable nanoimprint lithography with piezoelectric jetting of resist
Author :
Gehlhausen, David ; Menezes, Shalini ; Lichuan Chen ; Gyu-ho Kim ; Hongbing Lu ; Jinming Gao ; Hu, Wenfeng
Author_Institution :
Mech. Eng. Dept., Univ. of Texas at Dallas, Richardson, TX, USA
Abstract :
We report an jet rollable nanoimprint lithography tool as a low cost method to produce micro- and nano-structures rapidly over large areas. We integrated a piezoelectric nozzle to deposit resist in-line in a low-waste, high-precision manner. We demonstrate the capabilities of this system by creating a variety of microstructures in SU8 resist with high pattern transfer fidelity.
Keywords :
jets; nanolithography; piezoelectric devices; resists; soft lithography; jet rollable nanoimprint lithography; microstructure production; nanostructure production; piezoelectric jetting; piezoelectric nozzle; Belts; Films; Nanolithography; Resists; Viscosity;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6720909
