Title :
pH sensing comparison of vapor and solution APTES coated Si nanograting FETs
Author :
Pengyuan Zang ; Yuchen Liang ; Spurgin, Lisa ; Hu, Wenfeng
Author_Institution :
Electr. Eng. Dept., Univ. of Texas at Dallas, Richardson, TX, USA
Abstract :
We tested and compared the pH sensing with lithographically defined Si NGFETs modified in APTES-ethanol solution and APTES vapor. Both sensors show a good linear response over the pH range of ~ 4 - 9. The vapor APTES coated sensor exhibits higher sensitivity than the solution APTES coated sensor, although the hysteresis is slightly larger.
Keywords :
elemental semiconductors; field effect transistors; gas sensors; organic compounds; pH measurement; silicon; (3-aminopropyl)triethoxysilane; APTES-ethanol solution; Si; Si nanograting FET; linear response; lithographically defined Si NGFET; pH sensing; vapor APTES coated sensor; Ethanol; Field effect transistors; Logic gates; Sensitivity; Sensors; Silicon; Surface treatment;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6720910
