DocumentCode
3016622
Title
pH sensing comparison of vapor and solution APTES coated Si nanograting FETs
Author
Pengyuan Zang ; Yuchen Liang ; Spurgin, Lisa ; Hu, Wenfeng
Author_Institution
Electr. Eng. Dept., Univ. of Texas at Dallas, Richardson, TX, USA
fYear
2013
fDate
5-8 Aug. 2013
Firstpage
301
Lastpage
304
Abstract
We tested and compared the pH sensing with lithographically defined Si NGFETs modified in APTES-ethanol solution and APTES vapor. Both sensors show a good linear response over the pH range of ~ 4 - 9. The vapor APTES coated sensor exhibits higher sensitivity than the solution APTES coated sensor, although the hysteresis is slightly larger.
Keywords
elemental semiconductors; field effect transistors; gas sensors; organic compounds; pH measurement; silicon; (3-aminopropyl)triethoxysilane; APTES-ethanol solution; Si; Si nanograting FET; linear response; lithographically defined Si NGFET; pH sensing; vapor APTES coated sensor; Ethanol; Field effect transistors; Logic gates; Sensitivity; Sensors; Silicon; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location
Beijing
ISSN
1944-9399
Print_ISBN
978-1-4799-0675-8
Type
conf
DOI
10.1109/NANO.2013.6720910
Filename
6720910
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