Stiffness controlled SU-8-based nanocomposites: Application for 1 GHz matching layer conception

Author

Wang, S.-X. ; Carlier, J. ; Ndieguene, A. ; Campistron, P. ; Debavelaere, D.C. ; Soyer, C. ; Nongaillard, B. ; Zhao, X.-Z.

Author_Institution

IEMN-DOAE, Univesite de Valenciennes, Valenciennes

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

678

Lastpage

681

Abstract

The photoresist SU-8, often used in microtechnology, has been acoustically characterized at a frequency of 1 GHz thanks to thin-disk piezoelectric ZnO transducers. Acoustical characterization of SU-8-based nanocomposites made of SU-8 and nanosize TiO₂ and/or SrTiO₃ particles is presented. These nanocomposite materials would be used to achieve acoustical matching between silicon and water at a frequency of 1 GHz and of application for the integration of high frequency ultrasonic transducer in Lab-on-Chip for biological cell characterization.

Keywords

acoustic impedance; bioMEMS; cellular biophysics; lab-on-a-chip; nanocomposites; nanoparticles; nanosensors; nanotechnology; photoresists; piezoelectric transducers; strontium compounds; titanium compounds; ultrasonic transducers; zinc compounds; SrTiO₃; TiO₂; ZnO; acoustical matching; acoustically characterized nanosized particle; biological cell characterization; frequency 1 GHz; high frequency ultrasonic transducer; lab-on-chip; photoresist; stiffness controlled SU-8-based nanocomposites; thin-disk piezoelectric transducer; Acoustic materials; Acoustic transducers; Biological materials; Frequency; Nanobioscience; Nanocomposites; Piezoelectric transducers; Resists; Silicon; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2008. IUS 2008. IEEE

Conference_Location

Beijing

Print_ISBN

978-1-4244-2428-3

Electronic_ISBN

978-1-4244-2480-1

Type

conf

DOI

10.1109/ULTSYM.2008.0163

Filename

4803215