Title :
Micromachined PMN-PT single crystal composite transducers -- 15–75 MHz PC-MUT
Author :
Jiang, X. ; Snook, K. ; Cheng, A. ; Hackenberger, W.S. ; Geng, X.
Author_Institution :
TRS Technol., Inc., State College, PA
Abstract :
In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of PMN-PT single crystal piezoelectric composite transducers. Micromachined PMN-PT single crystal 1-3 composites with resonance frequencies of 15 MHz-75 MHz were fabricated and characterized with coupling coefficient of 0.67-0.79. Transducers with a frequency of 75 MHz were prototyped and characterized.
Keywords :
bioMEMS; biomedical transducers; biomedical ultrasonics; lead compounds; micromachining; piezoelectric transducers; ultrasonic transducers; PC-MUT; PMN-PT single crystal piezoelectric composite; PMN-PbTiO3; coupling coefficient; frequency 15 MHz to 75 MHz; medical imaging application; micromachined ultrasound transducer; resonance frequency; ultrasound imaging; Etching; Fabrication; Frequency; High-resolution imaging; Piezoelectric transducers; Prototypes; Resists; Resonance; Ultrasonic imaging; Ultrasonic transducers; 1–3 composite; PC-MUT; PMN-PT single crystal; micromachining of piezoelectrics; piezoelectric composite; ultrasound transducer;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0040
